Invention Grant
- Patent Title: Method of manufacturing metal wire and metal wire grid, wire grid polarizer, electronic device
-
Application No.: US16485810Application Date: 2019-01-24
-
Publication No.: US11619773B2Publication Date: 2023-04-04
- Inventor: Shuilang Dong , Xin Gu , Kang Guo , Da Lu , Qingzhao Liu , Lei Zhao
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Leason Ellis LLP
- Priority: CN201810759614.6 20180711
- International Application: PCT/CN2019/072993 WO 20190124
- International Announcement: WO2020/010838 WO 20200116
- Main IPC: C23F1/12
- IPC: C23F1/12 ; G02B5/30 ; G03F7/00 ; G03F7/16 ; G03F7/42
Abstract:
A method of manufacturing a metal wire, a method of manufacturing a metal wire grid, a wire grid polarizer, and an electronic device are provided. The method of manufacturing a metal wire includes: forming a metal material layer on a base substrate; etching the metal material layer by using a composite gas including an etching gas and a coating reaction gas to form the metal wire and a protective coating layer on a surface of the metal wire.
Public/Granted literature
- US20210333457A1 METHOD OF MANUFACTURING METAL WIRE AND METAL WIRE GRID, WIRE GRID POLARIZER, ELECTRONIC DEVICE Public/Granted day:2021-10-28
Information query
IPC分类:
