Invention Grant
- Patent Title: Optical waveguide device
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Application No.: US17350627Application Date: 2021-06-17
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Publication No.: US11624965B2Publication Date: 2023-04-11
- Inventor: Shuntaro Makino , Yoshinobu Kubota , Yasuhiro Ohmori , Masaharu Doi , Teruo Kurahashi
- Applicant: Fujitsu Optical Components Limited
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Optical Components Limited
- Current Assignee: Fujitsu Optical Components Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JPJP2020-136733 20200813
- Main IPC: G02F1/225
- IPC: G02F1/225 ; G02F1/035 ; G02F1/21

Abstract:
An optical waveguide device includes an intermediate layer, a thin-film LN layer including X-cut lithium niobate, and a buffer layer stacked on a substrate; an optical waveguide formed in the thin-film LN layer; and an electrode for driving. The intermediate layer is formed by an upper first intermediate layer and a lower second intermediate layer, the second intermediate layer having a permittivity that is smaller than a permittivity of the first intermediate layer.
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