- 专利标题: Quality prediction using process data
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申请号: US17944291申请日: 2022-09-14
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公开(公告)号: US11630973B2公开(公告)日: 2023-04-18
- 发明人: Deovrat Vijay Kakde , Haoyu Wang , Anya Mary McGuirk
- 申请人: SAS Institute Inc.
- 申请人地址: US NC Cary
- 专利权人: SAS Institute Inc.
- 当前专利权人: SAS Institute Inc.
- 当前专利权人地址: US NC Cary
- 代理机构: Coats & Bennett, PLLC
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G06K9/62 ; G06N20/00 ; H01L21/66
摘要:
A computing device accesses a machine learning model trained on training data of first bonding operations (e.g., a ball and/or stitch bond). The first bonding operations comprise operations to bond a first set of multiple wires to a first set of surfaces. The machine learning model is trained by supervised learning. The device receives input data indicating process data generated from measurements of second bonding operations. The second bonding operations comprise operations to bond a second set of multiple wires to a second set of surfaces. The device weights the input data according to the machine learning model. The device generates an anomaly predictor indicating a risk for an anomaly occurrence in the second bonding operations based on weighting the input data according to the machine learning model. The device outputs the anomaly predictor to control the second bonding operations.
公开/授权文献
- US20230025373A1 Quality Prediction Using Process Data 公开/授权日:2023-01-26
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