- 专利标题: Parallel structure, method of manufacturing the same, and electronic device including the same
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申请号: US17042832申请日: 2018-10-31
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公开(公告)号: US11631669B2公开(公告)日: 2023-04-18
- 发明人: Huilong Zhu
- 申请人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 申请人地址: CN Beijing
- 专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人地址: CN Beijing
- 代理机构: Christensen, Fonder, Dardi & Herbert PLLC
- 优先权: CN201811171611.7 20181008
- 国际申请: PCT/CN2018/113040 WO 20181031
- 国际公布: WO2020/073377 WO 20200416
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L27/088 ; H01L21/77 ; H01L25/065 ; H01L29/66 ; H01L29/78
摘要:
A parallel structure comprising source/drain and channel layers alternately stacked on a substrate, and gate stacks formed around peripheries of the channel layers. Each of the channel layers, the source/drain layers on upper and lower sides of the channel layer, and the gate stack formed around the channel layer, form a semiconductor device. In each semiconductor device, one of the source/drain layers is in contact with a first electrically-conductive channel disposed on an outer periphery of the active region, the other is in contact with a second electrically-conductive channel on the outer periphery of the active region, and the gate stack is in contact with a third electrically-conductive channel disposed on the outer periphery of the active region. The first electrically-conductive channel is common to the semiconductor devices, the second electrically-conductive channel is common to the semiconductor devices, and the third electronically-conductive channel is common to the semiconductor devices.
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