- 专利标题: Method of forming high mobility complementary metal-oxide-semiconductor (CMOS) devices with fins on insulator
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申请号: US17131929申请日: 2020-12-23
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公开(公告)号: US11637041B2公开(公告)日: 2023-04-25
- 发明人: Xin Miao , Chen Zhang , Kangguo Cheng , Wenyu Xu
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Amin, Turocy & Watson, LLP
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L21/02 ; H01L27/12 ; H01L29/10 ; H01L29/78 ; H01L29/161 ; H01L29/20 ; H01L29/66 ; H01L29/737 ; H01L29/786
摘要:
The subject disclosure relates to high mobility complementary metal-oxide-semiconductor (CMOS) devices and techniques for forming the CMOS devices with fins formed directly on the insulator. According to an embodiment, a method for forming such a high mobility CMOS device can comprise forming, via a first epitaxial growth of a first material, first pillars within first trenches formed within a dielectric layer, wherein the dielectric layer is formed on a silicon substrate, and wherein the first pillars comprise first portions with defects and second portions without the defects. The method can further comprise forming second trenches within a first region of the dielectric layer, and further forming second pillars within the second trenches via a second epitaxial growth of one or more second materials using the second portions of the first pillars as seeds for the second epitaxial growth.
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