Invention Grant
- Patent Title: Semiconductor device with V2V rail and methods of making same
-
Application No.: US17220345Application Date: 2021-04-01
-
Publication No.: US11637069B2Publication Date: 2023-04-25
- Inventor: Jung-Chan Yang , Chi-Yu Lu , Hui-Zhong Zhuang , Chih-Liang Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/768 ; H01L29/40 ; H01L29/417 ; H01L23/522 ; H01L21/8234 ; H01L23/538 ; H01L27/02 ; H01L23/528

Abstract:
A semiconductor device including: an active region; first, second and third metal-to-drain/source (MD) contact structures which extend in a first direction and correspondingly overlap the active region; a via-to-via (V2V) rail which extends in a second direction perpendicular to the first direction, and overlaps the first, second and third MD contact structures; a first conductive segment which overlaps the V2V rail, is in a first metallization layer, and, relative to the second direction, overlaps each of the first, second and third MD contact structures; and a first via-to-MD (VD) structure between the first MD contact structure and the first conductive segment, the first VD structure electrically coupling the first conductive segment, the V2V rail and the first MD contact structure; wherein at least one of the second or third MD contact structures is electrically decoupled from the V2V rail.
Public/Granted literature
- US20220068816A1 SEMICONDUCTOR DEVICE WITH V2V RAIL AND METHODS OF MAKING SAME Public/Granted day:2022-03-03
Information query
IPC分类: