- 专利标题: Three-dimensional (3D) semiconductor memory device
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申请号: US16802736申请日: 2020-02-27
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公开(公告)号: US11637121B2公开(公告)日: 2023-04-25
- 发明人: Junhyoung Kim , Geunwon Lim , Manjoong Kim
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2019-0085270 20190715
- 主分类号: H01L27/11519
- IPC分类号: H01L27/11519 ; H01L27/11582 ; H01L27/11565 ; H01L27/11556 ; H01L27/11524 ; H01L27/1157
摘要:
A three-dimensional semiconductor memory device includes a substrate including a first connection region and a second connection region in a first direction and a cell array region between the first and second connection regions, and a first block structure on the substrate. The first block structure has a first width on the cell array region, the first block structure has a second width on the first connection region, and the first block structure has a third width on the second connection region. The first, second and third widths are parallel to a second direction intersecting the first direction, and the first width is less than the second width and is greater than the third width.
公开/授权文献
- US20210020656A1 THREE-DIMENSIONAL (3D) SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2021-01-21
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