- Patent Title: Getter technology for micromachined ultrasonic transducer cavities
-
Application No.: US16680956Application Date: 2019-11-12
-
Publication No.: US11638931B2Publication Date: 2023-05-02
- Inventor: Keith G. Fife , Lingyun Miao , Jianwei Liu , Jonathan M. Rothberg
- Applicant: BFLY OPERATIONS, INC.
- Applicant Address: US CT Guilford
- Assignee: BFLY OPERATIONS, INC.
- Current Assignee: BFLY OPERATIONS, INC.
- Current Assignee Address: US CT Guilford
- Agency: Osha Bergman Watanabe & Burton LLP
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B06B1/02 ; B81C1/00 ; A61B8/00
Abstract:
A method of forming an ultrasonic transducer device includes bonding a membrane to seal a transducer cavity with at least a portion of a getter material layer being exposed, the getter material layer comprising a portion of a bilayer stack compatible for use in damascene processing.
Public/Granted literature
- US20200147641A1 GETTER TECHNOLOGY FOR MICROMACHINED ULTRASONIC TRANSDUCER CAVITIES Public/Granted day:2020-05-14
Information query
