Invention Grant
- Patent Title: Etching composition for thin film containing silver, method for forming pattern and method for manufacturing a display device using the same
-
Application No.: US17388712Application Date: 2021-07-29
-
Publication No.: US11639470B2Publication Date: 2023-05-02
- Inventor: Jonghee Park , Hyoung Sik Kim , O Byoung Kwon , Gi-Yong Nam , Kyungchan Min , Suck Jun Lee , Youngmin Kim , Jinhyung Kim , Donghun Lee , Kyu-Hun Lim , Dongmin Jang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: Innovation Counsel LLP
- Priority: KR10-2020-0185187 20201228
- Main IPC: C09K13/06
- IPC: C09K13/06 ; C23F1/44 ; H01L51/00 ; C23F1/02
Abstract:
An etching composition for a silver-containing thin film, the etching composition comprising an inorganic acid compound, a sulfonic acid compound, an organic acid compound, a nitrate, a metal oxidizing agent, an amino acid compound, and water.
Public/Granted literature
Information query
