Invention Grant
- Patent Title: Integrated photoacoustic gas sensor and method for manufacturing the same
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Application No.: US17498755Application Date: 2021-10-12
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Publication No.: US11639891B2Publication Date: 2023-05-02
- Inventor: Joonhyun Kang , Il Ki Han , S. Joon Kwon , Young Min Jhon
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Cantor Colburn LLP
- Priority: KR10-2020-0135896 20201020
- Main IPC: G01N21/17
- IPC: G01N21/17 ; G01N33/00
Abstract:
The present disclosure relates to a photoacoustic gas sensor for detecting the presence or absence of gas using the interaction of a laser beam and gas molecules. The integrated photoacoustic gas sensor according to an embodiment includes a light output unit; a lens unit configured to concentrate a laser beam output from the light output unit; and a photoacoustic sensing unit having a quartz tuning fork aligned on the lens unit and configured to convert a vibration, generated when the laser beam passing through the lens unit interacts with gas molecules, into an electric signal.
Public/Granted literature
- US20220120669A1 INTEGRATED PHOTOACOUSTIC GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-04-21
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