- 专利标题: Field-effect transistor, field-effect transistor array structure and method of manufacturing field-effect transistor
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申请号: US17399175申请日: 2021-08-11
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公开(公告)号: US11640980B2公开(公告)日: 2023-05-02
- 发明人: Kwanghee Lee , Sangwook Kim
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2020-0150512 20201111
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L27/088 ; H01L29/78 ; H01L29/06 ; H01L29/24
摘要:
A field-effect transistor includes a gate structure comprising a structure in which a first insulating layer, a first gate electrode, and a second insulating layer are sequentially stacked on a first conductive layer, the gate structure surrounding a first hole through the first insulating layer and exposing a part of the first conductive layer; a second conductive layer on the second insulating layer and surrounding a second hole connected to the first hole and exposing a part of the first conductive layer; a first gate insulating layer covering an inner wall of the gate structure exposed by the first hole; a semiconductor layer covering a part of the first conductive layer exposed through the first hole and the second hole, the first gate insulating layer, and the second conductive layer; a second gate insulating layer covering the semiconductor layer; and a second gate electrode filling the first and second holes.
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