Invention Grant
- Patent Title: Ultrasonic probe and ultrasonic measurement apparatus using the same
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Application No.: US16768863Application Date: 2018-08-23
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Publication No.: US11642695B2Publication Date: 2023-05-09
- Inventor: Shuntaro Machida , Akifumi Sako , Yasuhiro Yoshimura
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM HEALTHCARE CORPORATION
- Current Assignee: FUJIFILM HEALTHCARE CORPORATION
- Current Assignee Address: JP Chiba
- Agency: Miles & Stockbridge, P.C.
- Priority: JP 2018061219 2018.03.28
- International Application: PCT/JP2018/031066 2018.08.23
- International Announcement: WO2019/187197A 2019.10.03
- Date entered country: 2020-06-01
- Main IPC: B06B1/02
- IPC: B06B1/02 ; A61B8/00 ; H01L23/498 ; H01L23/00

Abstract:
An ultrasonic probe includes a semiconductor chip in which an ultrasonic transducer is formed and an electrode pad electrically connected to an upper electrode or a lower electrode of the ultrasonic transducer is provided and a flexible substrate in which a bump electrically connected to the electrode pad is provided and the bump is disposed in a portion overlapping with a stepped portion of the semiconductor chip. Further, a height of a connection surface of the electrode pad of the semiconductor chip connected to the bump is lower than a height of a lower surface of the lower electrode.
Public/Granted literature
- US20210162462A1 ULTRASONIC PROBE AND ULTRASONIC MEASUREMENT APPARATUS USING THE SAME Public/Granted day:2021-06-03
Information query
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