Magnet module and sputtering apparatus including the same
Abstract:
A magnet module includes at least one magnet unit. The magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion, which is disposed in the middle portion and extends along the first direction, and a second portion, which is disposed in the end portion and has a width greater than a width of the first portion.
Public/Granted literature
Information query
Patent Agency Ranking
0/0