Invention Grant
- Patent Title: Magnet module and sputtering apparatus including the same
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Application No.: US17483883Application Date: 2021-09-24
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Publication No.: US11646140B2Publication Date: 2023-05-09
- Inventor: Nayoung Lee , Kwanyong Lee , Sangmok Nam
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: Innovation Counsel LLP
- Priority: KR 20200151375 2020.11.12
- Main IPC: H01F7/02
- IPC: H01F7/02 ; H01J37/34

Abstract:
A magnet module includes at least one magnet unit. The magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion, which is disposed in the middle portion and extends along the first direction, and a second portion, which is disposed in the end portion and has a width greater than a width of the first portion.
Public/Granted literature
- US20220148779A1 MAGNET MODULE AND SPUTTERING APPARATUS INCLUDING THE SAME Public/Granted day:2022-05-12
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