- 专利标题: Plasma processing apparatus and plasma processing method
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申请号: US17376771申请日: 2021-07-15
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公开(公告)号: US11646181B2公开(公告)日: 2023-05-09
- 发明人: Natsumi Torii , Koichi Nagami
- 申请人: TOKYO ELECTRON LIMITED
- 申请人地址: JP Tokyo
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo
- 代理机构: Weihrouch IP
- 优先权: JP 2020122121 2020.07.16
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A plasma processing apparatus includes: a chamber; a substrate support provided inside the chamber and including an electrode, an electrostatic chuck provided on the electrode, and an edge ring that is disposed on the electrostatic chuck while surrounding the substrate placed on the electrostatic chuck; a radio-frequency power supply that supplies radio-frequency power for generating plasma from a gas within the chamber; a DC power supply that applies a negative DC voltage to the edge ring; and a controller that controls the radio-frequency power and the DC voltage. The controller controls the apparatus to execute a process including: (a) stopping application of the DC voltage while stopping supply of the radio-frequency power; and (b) starting the application of the DC voltage after a predetermined delay time elapses since the supply of the radio-frequency power.
公开/授权文献
- US20220020576A1 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD 公开/授权日:2022-01-20
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