Invention Grant
- Patent Title: Transistor with multi-level self-aligned gate and source/drain terminals and methods
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Application No.: US17146513Application Date: 2021-01-12
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Publication No.: US11646351B2Publication Date: 2023-05-09
- Inventor: Johnatan A. Kantarovsky , Mark D. Levy , Jeonghyun Hwang , Siva P. Adusumilli , Ajay Raman
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/778 ; H01L29/66 ; H01L29/417 ; H01L29/423 ; H01L21/768 ; H01L29/49 ; H01L29/47 ; H01L29/45

Abstract:
Disclosed are a transistor and a method for forming the transistor. The method includes concurrently forming gate and source/drain openings through an uppermost layer (i.e., a dielectric layer) in a stack of layers. The method can further include: depositing and patterning gate conductor material so that a first gate section is in the gate opening and a second gate section is above the gate opening and so that the source/drain openings are exposed; extending the depth of the source/drain openings; and depositing and patterning source/drain conductor material so that a first source/drain section is in each source/drain opening and a second source/drain section is above each source/drain opening. Alternatively, the method can include: forming a plug in the gate opening and sidewall spacers in the source/drain openings; extending the depth of source/drain openings; depositing and patterning the source/drain conductor material; and subsequently depositing and patterning the gate conductor material.
Public/Granted literature
- US20220223694A1 TRANSISTOR WITH MULTI-LEVEL SELF-ALIGNED GATE AND SOURCE/DRAIN TERMINALS AND METHODS Public/Granted day:2022-07-14
Information query
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