- 专利标题: Vibrator device, electronic apparatus, and vehicle
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申请号: US17679272申请日: 2022-02-24
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公开(公告)号: US11650054B2公开(公告)日: 2023-05-16
- 发明人: Ryuta Nishizawa , Seiichiro Ogura , Keiichi Yamaguchi
- 申请人: Seiko Epson Corporation
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP 2019057447 2019.03.25
- 主分类号: G01C19/5705
- IPC分类号: G01C19/5705
摘要:
Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0
公开/授权文献
- US20220178694A1 Vibrator Device, Electronic Apparatus, And Vehicle 公开/授权日:2022-06-09
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