Invention Grant
- Patent Title: Thin film transistor deck selection in a memory device
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Application No.: US17327042Application Date: 2021-05-21
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Publication No.: US11659705B2Publication Date: 2023-05-23
- Inventor: Daniele Vimercati
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: G11C11/24
- IPC: G11C11/24 ; H01L27/108 ; H01L27/06 ; H01L27/11514 ; G11C11/408 ; G11C11/22 ; H01L29/786

Abstract:
Methods, systems, and devices for thin film transistor deck selection in a memory device are described. A memory device may include memory arrays arranged in a stack of decks formed over a substrate, and deck selection components distributed among the layers to leverage common substrate-based circuitry. For example, each memory array of the stack may include a set of digit lines of a corresponding deck, and deck selection circuitry operable to couple the set of digit lines with a column decoder that is shared among multiple decks. To access memory cells of a selected memory array on one deck, the deck selection circuitry corresponding to the memory array may each be activated, while the deck selection circuitry corresponding to a non-selected memory array on another deck may be deactivated. The deck selection circuitry, such as transistors, may leverage thin-film manufacturing techniques, such as various techniques for forming vertical transistors.
Public/Granted literature
- US20220375940A1 THIN FILM TRANSISTOR DECK SELECTION IN A MEMORY DEVICE Public/Granted day:2022-11-24
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