Invention Grant
- Patent Title: MEMS gyroscope and electronic device using same
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Application No.: US17566733Application Date: 2021-12-31
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Publication No.: US11674804B2Publication Date: 2023-06-13
- Inventor: Shan Yang , Zhan Zhan , Hongtao Peng , Zhao Ma , Xiao Kan , Yang Li , Kahkeen Lai , Yan Hong , Veronica Tan
- Applicant: AAC Kaitai Technologies (Wuhan) CO., LTD , AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- Applicant Address: CN Hubei
- Assignee: AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD,AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Current Assignee: AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD,AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Current Assignee Address: CN Wuhan; CN Shenzhen
- Agency: W&G Law Group
- Priority: CN 2122573095.4 2021.10.25
- Main IPC: G01C19/5712
- IPC: G01C19/5712

Abstract:
The present invention provides a MEMS gyroscope having internal coupling beam, an external coupling beam, a drive structure and a detection structure. The drive structure includes multiple driving weights, and the detection structure includes multiple testing weights. The drive structure further includes a first decoupling structure and a first transducer. The first decoupling structure is arranged on the side of the driving weight far away from the internal coupling beam, and the first transducer excites the driving weight to vibrate. The MEMS gyroscope of the present invention can fully increase the layout area of the first transducer, thereby realizing a larger vibration amplitude under a small driving voltage, thereby increasing the sensitivity.
Public/Granted literature
- US20230130249A1 MEMS Gyroscope and Electronic Device Using Same Public/Granted day:2023-04-27
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