- 专利标题: Semiconductor structure and the manufacturing method thereof
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申请号: US17723305申请日: 2022-04-18
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公开(公告)号: US11676987B2公开(公告)日: 2023-06-13
- 发明人: Zhen Gu , Zhi Tian , Qiwei Wang , Haoyu Chen
- 申请人: Shanghai Huali Microelectronics Corporation
- 申请人地址: CN Shanghai
- 专利权人: Shanghai Huali Microelectronics Corporation
- 当前专利权人: Shanghai Huali Microelectronics Corporation
- 当前专利权人地址: CN Shanghai
- 优先权: CN 1910265516.1 2019.04.03
- 分案原申请号: US16855803 2020.04.22
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
The present invention provides a semiconductor structure for forming a CMOS image sensor. The semiconductor structure includes at least a photodiode formed in the substrate for collecting photoelectrons, and the photodiode has a pinning layer, a first doped region and a second doped region in order from top to bottom in a height direction of the substrate. The semiconductor structure further includes a third doped region located in the substrate corresponding to a laterally extending region of the second doped region. The first doped region has an ion doping concentration greater than the ion doping concentration of the second doped region, the ion doping concentration of the second doped region is greater than the ion doping concentration of the third doped region, and the third doped region is in contact with the second doped region after diffusion. The present invention also provides a method of manufacturing the above-described semiconductor structure.
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