Invention Grant
- Patent Title: Support structure and method of forming a support structure
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Application No.: US17681848Application Date: 2022-02-28
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Publication No.: US11679461B2Publication Date: 2023-06-20
- Inventor: Alfons Dehe , Reinhard Gabl , Ulrich Krumbein
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Viering, Jentschura & Partner mbB
- The original application number of the division: US16402248 2019.05.03
- Main IPC: B23Q3/18
- IPC: B23Q3/18 ; H04R7/18 ; H04R17/00 ; H04R19/00 ; H04R31/00 ; B81B3/00 ; B81C1/00

Abstract:
A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.
Public/Granted literature
- US20220388105A1 SUPPORT STRUCTURE AND METHOD OF FORMING A SUPPORT STRUCTURE Public/Granted day:2022-12-08
Information query
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