Invention Grant
- Patent Title: Gas mixing for fast temperature control of a cooling hood
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Application No.: US17282029Application Date: 2019-09-26
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Publication No.: US11681233B2Publication Date: 2023-06-20
- Inventor: Joost De Hoogh , Alain Louis Claude Leroux , Alexander Marinus Arnoldus Huijberts , Christiaan Louis Valentin , Robert Coenraad Wit , Dries Vaast Paul Hemschoote , Frits Van Der Meulen , Johannes Franciscus Martinus Van Santvoort , Radu Donose
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 198758 2018.10.05 EP 197024 2019.09.12
- International Application: PCT/EP2019/076001 2019.09.26
- International Announcement: WO2020/069960A 2020.04.09
- Date entered country: 2021-04-01
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; F25D3/10

Abstract:
A system having a sub-system that is configured to change a thermal condition of a physical component from a set-point to a new set-point, wherein the sub-system includes: a mixer operative to receive a first conditioning fluid having a first temperature and a second conditioning fluid having a second temperature different from the first temperature, and operative to supply to the physical component a mix of the first conditioning fluid and the second conditioning fluid; and a controller configured to control the mixer in dependence on the new set-point. Also a method of operating a lithographic apparatus as well as a device manufactured using the system described herein or according to methods described herein.
Public/Granted literature
- US20210356875A1 GAS MIXING FOR FAST TEMPERATURE CONTROL OF A COOLING HOOD Public/Granted day:2021-11-18
Information query
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