Invention Grant
- Patent Title: Automatic optimization of an examination recipe
-
Application No.: US17697063Application Date: 2022-03-17
-
Publication No.: US11686689B2Publication Date: 2023-06-27
- Inventor: Amir Bar
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G06T7/00

Abstract:
There is provided a system and method of automatic optimization of an examination recipe. The method includes obtaining one or more inspection images each representative of at least a portion of the semiconductor specimen, the one or more inspection images being indicative of respective defect candidates selected from a defect map using a first classifier included in the examination recipe; obtaining label data respectively associated with the one or more inspection images and informative of types of the respective defect candidates; extracting inspection features characterizing the one or more inspection images; retraining the first classifier using the first features and the label data, giving rise to a second classifier; and optimizing the examination recipe by replacing the first classifier with the second classifier; wherein the optimized examination recipe is usable for examining a subsequent semiconductor specimen.
Public/Granted literature
- US20220205928A1 AUTOMATIC OPTIMIZATION OF AN EXAMINATION RECIPE Public/Granted day:2022-06-30
Information query