- 专利标题: Multifunctional heterojunction metal oxide gas sensor
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申请号: US17030675申请日: 2020-09-24
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公开(公告)号: US11686697B2公开(公告)日: 2023-06-27
- 发明人: Andrea Fasoli
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Jeffrey M. Ingalls
- 主分类号: G01N27/12
- IPC分类号: G01N27/12 ; H01L29/24 ; G01N27/14 ; G01N25/18 ; G01N25/48 ; G01N25/20
摘要:
A method of identifying a gas is provided. The method includes providing a gas sensor device comprising at least two stacked metal oxide layers, wherein a change in conductance of the gas sensor device in a presence of a gas varies with a temperature of the stacked metal oxide layers. The method includes bringing the gas into proximity with the stacked metal oxide layers. The method also includes measuring the conductance of the gas sensor device when the gas is in proximity with the stacked layers at multiple temperatures to generate a temperature-conductance profile. The method also includes identifying a gas of interest based on the temperature-conductance profile.
公开/授权文献
- US20220091060A1 MULTIFUNCTIONAL HETEROJUNCTION METAL OXIDE GAS SENSOR 公开/授权日:2022-03-24
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