Invention Grant
- Patent Title: Production of very small or thin dies
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Application No.: US16497113Application Date: 2018-03-27
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Publication No.: US11688638B2Publication Date: 2023-06-27
- Inventor: Winston K. Chan , Joey J. Michalchuk
- Applicant: SRI International
- Applicant Address: US CA Menlo Park
- Assignee: SRI International
- Current Assignee: SRI International
- Current Assignee Address: US CA Menlo Park
- Agency: Rutan and Tucker, LLP
- International Application: PCT/US2018/024541 2018.03.27
- International Announcement: WO2018/183309A 2018.10.04
- Date entered country: 2019-09-24
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/78 ; B32B43/00 ; C09J9/02 ; C09J11/04 ; C09J191/06 ; H01L21/67 ; H01L29/06 ; C08K3/08

Abstract:
A system to manufacture a plurality of dies may include an etching tool, an electrically-conductive-adhesive-composition, a heat-applying-extraction-tool and a porous substrate cooperating with an evacuation component. The etching tool uses an ion beam that is configured to singulate a plurality of dies on a wafer with an ion etching process. The electrically-conductive-adhesive-composition is located between the wafer and a porous substrate carrying the wafer during the ion etching process. The electrically-conductive-adhesive-composition adheres the wafer to the porous substrate to keep the dies in place during the ion etching process. The electrically-conductive-adhesive-composition also aids in conducting electrons away from the wafer as a drain during the ion etching process. The heat-applying-extraction-tool applies heat to an individual die during a handling process of the manufacturing process in order to melt the electrically-conductive-adhesive-composition through the porous substrate to an evacuation component in order to then pick up an individual die singulated from the wafer.
Public/Granted literature
- US20210125867A1 PRODUCTION OF VERY SMALL OR THIN DIES Public/Granted day:2021-04-29
Information query
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