Invention Grant
- Patent Title: Microelectronic devices and related methods of forming microelectronic devices
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Application No.: US17652346Application Date: 2022-02-24
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Publication No.: US11690234B2Publication Date: 2023-06-27
- Inventor: Bo Zhao , Nancy M. Lomeli , Lifang Xu , Adam L. Olson
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- The original application number of the division: US16799254 2020.02.24
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L21/8229 ; H01L21/768 ; H01L27/11573 ; H01L27/1157 ; H01L27/11578

Abstract:
A microelectronic device comprises a microelectronic device structure having a memory array region and a staircase region. The microelectronic device structure comprises a stack structure having tiers each comprising a conductive structure and an insulative structure; staircase structures confined within the staircase region and having steps comprising edges of the tiers of the stack structure within the deck and the additional deck; and semiconductive pillar structures confined within the memory array region and extending through the stack structures. The stack structure comprises a deck comprising a group of the tiers; an additional deck overlying the deck and comprising an additional group of the tiers; and an interdeck section between the deck and the additional deck and comprising a dielectric structure confined within the memory array region, and another group of the tiers within vertical boundaries of the dielectric structure and confined within the staircase region.
Public/Granted literature
- US20220189827A1 MICROELECTRONIC DEVICES AND RELATED METHODS OF FORMING MICROELECTRONIC DEVICES Public/Granted day:2022-06-16
Information query
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