Invention Grant
- Patent Title: System and tool for cleaning a glass surface of an accelerator column
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Application No.: US17007044Application Date: 2020-08-31
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Publication No.: US11691184B2Publication Date: 2023-07-04
- Inventor: Michael J. Blanchard , Nevin H. Clay , Joshua R. Conahan , Christopher Lupoli
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Agency: KDW Firm PLLC
- The original application number of the division: US15489133 2017.04.17
- Main IPC: B08B9/00
- IPC: B08B9/00 ; B08B1/00 ; A47L13/16 ; A47L13/46 ; H01J37/317 ; B08B1/04 ; B08B5/04

Abstract:
A cleaning tool for cleaning a glass surface of an accelerator column is disclosed. The cleaning tool includes a shaft including a first end and a second end; a foam body located at the first end of the shaft; and a mounting bracket coupled to the first end of the shaft, the mounting bracket receiving the foam body. An outer circumference of the foam body includes a textured cleaning surface for contacting the glass surface of the accelerator column.
Information query
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