Invention Grant
- Patent Title: Optical waveguide device and method of manufacturing optical waveguide device
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Application No.: US17169983Application Date: 2021-02-08
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Publication No.: US11693291B2Publication Date: 2023-07-04
- Inventor: Shuntaro Makino , Yoshinobu Kubota , Yasuhiro Ohmori , Masaharu Doi , Shintaro Takeuchi
- Applicant: Fujitsu Optical Components Limited
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Optical Components Limited
- Current Assignee: Fujitsu Optical Components Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JP 20075237 2020.04.21
- Main IPC: G02F1/225
- IPC: G02F1/225 ; G02F1/03 ; F21V8/00

Abstract:
An optical waveguide device has a substrate, an intermediate layer, a thin-film LN layer containing an X-cut lithium niobate, and a buffer layer stacked on the substrate, and an optical waveguide having a ridge shape formed in the thin-film LN layer. The optical waveguide device includes a plurality of electrodes provided, respectively, at a first side and a second side of the optical waveguide. The electrodes are disposed so that respective bottom surfaces thereof are at positions lower than a position of a surface of the buffer layer.
Public/Granted literature
- US20210325761A1 OPTICAL WAVEGUIDE DEVICE AND METHOD OF MANUFACTURING OPTICAL WAVEGUIDE DEVICE Public/Granted day:2021-10-21
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