- 专利标题: Method and system for generating a diffraction image
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申请号: US17374459申请日: 2021-07-13
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公开(公告)号: US11694874B2公开(公告)日: 2023-07-04
- 发明人: Bart Buijsse , Bart Jozef Janssen
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 主分类号: H01J37/22
- IPC分类号: H01J37/22 ; H01J37/26 ; H01J37/295
摘要:
Method and system for generating a diffraction image comprises acquiring multiple frames from a direct-detection detector responsive to irradiating a sample with an electron beam. Multiple diffraction peaks in the multiple frames are identified. A first dose rate of at least one diffraction peak in the identified diffraction peaks is estimated in the counting mode. If the first dose rate is not greater than a threshold dose rate, a diffraction image including the diffraction peak is generated by counting electron detection events. Values of pixels belonging to the diffraction peak are determined with a first set of counting parameter values corresponding to a first coincidence area. Values of pixels not belonging to any of the multiple diffraction peaks are determined using a second, set of counting parameter values corresponding to a second, different, coincidence area.
公开/授权文献
- US20230020957A1 METHOD AND SYSTEM FOR GENERATING A DIFFRACTION IMAGE 公开/授权日:2023-01-19
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