- 专利标题: Laser device and electronic device manufacturing method
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申请号: US17665087申请日: 2022-02-04
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公开(公告)号: US11695248B2公开(公告)日: 2023-07-04
- 发明人: Keisuke Ishida
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 代理机构: Studebaker & Brackett PC
- 主分类号: H01S3/134
- IPC分类号: H01S3/134 ; H01S3/102 ; H01S3/094 ; H01S3/10
摘要:
A laser device may include a laser resonator; a chamber arranged on an optical path of the laser resonator; a pair of electrodes arranged in the chamber; a power source applying a voltage to the electrodes; a storage unit storing a voltage value; and a control unit configured to set an application voltage value of the voltage applied to the electrodes as setting the application voltage value for outputting a pulse whose pulse number is equal to or larger than 1 and smaller than i based on the voltage command value and the voltage value stored in the storage unit, and setting the application voltage for outputting a pulse whose pulse number is equal to or larger than i and smaller than j based on the voltage command value and an offset value corresponding to the voltage command value, where i>1 and j>i.
公开/授权文献
- US20220158408A1 LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD 公开/授权日:2022-05-19
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