Invention Grant
- Patent Title: Light sensor using pixel optical diffraction gratings having different pitches
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Application No.: US17024202Application Date: 2020-09-17
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Publication No.: US11698296B2Publication Date: 2023-07-11
- Inventor: Stephane Monfray , Olivier Le Neel , Frederic Boeuf
- Applicant: STMicroelectronics (Crolles 2) SAS , STMicroelectronics SA
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics SA
- Current Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics SA
- Current Assignee Address: FR Crolles; FR Montrouge
- Agency: Crowe & Dunlevy
- Priority: FR 10593 2019.09.25
- Main IPC: G01J1/04
- IPC: G01J1/04 ; H01L31/0232 ; G01J1/44 ; G02B5/18 ; H01L31/101

Abstract:
A light sensor includes a semiconductor substrate supporting a number of pixels. Each pixel includes a photoconversion zone extending in the substrate between a front face and a back face of the substrate. An optical diffraction grating is arranged over the back face of the substrate at a position facing the photoconversion zone of the pixel. For at least two different pixels of the light sensor, the optical diffraction gratings have different pitches. Additionally, the optical grating of each pixel is surrounded by an opaque wall configured to absorb at operating wavelengths of the sensor.
Public/Granted literature
- US20210088378A1 LIGHT SENSOR Public/Granted day:2021-03-25
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