Invention Grant
- Patent Title: Collector mirror and apparatus for creating extreme ultraviolet light including the same
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Application No.: US17709534Application Date: 2022-03-31
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Publication No.: US11698590B2Publication Date: 2023-07-11
- Inventor: Hoseok Song , Sunghyup Kim , Injae Lee , Jeonggil Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR 20210118840 2021.09.07
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; H05G2/00
Abstract:
A collector mirror for an extreme ultraviolet (EUV) light generator includes a first mirror in a vessel, the vessel being configured to receive a material and a laser beam for generating the EUV light, a second mirror surrounding the first mirror, and a detachable third mirror between the first mirror and the second mirror, the third mirror having an inner diameter that is not smaller than an outer diameter of the first mirror, and an outer diameter that is not larger than an inner diameter of the second mirror.
Public/Granted literature
- US20230071131A1 COLLECTOR MIRROR AND APPARATUS FOR CREATING EXTREME ULTRAVIOLET LIGHT INCLUDING THE SAME Public/Granted day:2023-03-09
Information query
IPC分类:
