- 专利标题: Three-dimensional memory devices having a plurality of NAND strings located between a substrate and a single crystalline silicon layer
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申请号: US17340596申请日: 2021-06-07
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公开(公告)号: US11699657B2公开(公告)日: 2023-07-11
- 发明人: Jifeng Zhu , Zhenyu Lu , Jun Chen , Yushi Hu , Qian Tao , Simon Shi-Ning Yang , Steve Weiyi Yang
- 申请人: Yangtze Memory Technologies Co., Ltd.
- 申请人地址: CN Hubei
- 专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人地址: CN Hubei
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 优先权: CN 1710831396.8 2017.09.15
- 分案原申请号: US16386817 2019.04.17
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L25/18 ; H01L25/00 ; H01L23/48 ; H01L23/522 ; H10B41/27 ; H10B41/35 ; H10B41/41 ; H10B43/10 ; H10B43/27 ; H10B43/35 ; H10B43/40 ; H10B43/50 ; H01L23/532
摘要:
Embodiments of source structure of a three-dimensional (3D) memory device and method for forming the source structure of the 3D memory device are disclosed. In an example, a NAND memory device includes a substrate, an alternating conductor/dielectric stack, a NAND string, a source conductor layer, and a source contact. The alternating conductor/dielectric stack includes a plurality of conductor/dielectric pairs above the substrate. The NAND string extends vertically through the alternating conductor/dielectric stack. The source conductor layer is above the alternating conductor/dielectric stack and is in contact with an end of the NAND string. The source contact includes an end in contact with the source conductor layer. The NAND string is electrically connected to the source contact by the source conductor layer. In some embodiments, the source conductor layer includes one or more conduction regions each including one or more of a metal, a metal alloy, and a metal silicide.
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