Invention Grant
- Patent Title: Optical detection for bio-entities
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Application No.: US17111255Application Date: 2020-12-03
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Publication No.: US11702691B2Publication Date: 2023-07-18
- Inventor: Allen Timothy Chang , Yi-Hsien Chang , Chun-Ren Cheng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: C12Q1/6869
- IPC: C12Q1/6869 ; G01N27/447 ; B01L3/00 ; G01N21/05 ; G01N21/64 ; B01F33/302 ; B01F33/3031 ; G02B6/122 ; G01N21/03

Abstract:
An integrated semiconductor device for manipulating and processing bio-entity samples and methods are described. The device includes a lower substrate, at least one optical signal conduit disposed on the lower substrate, at least one cap bonding pad disposed on the lower substrate, a cap configured to form a capped area, and disposed on the at least one cap bonding pad, a fluidic channel, wherein a first side of the fluidic channel is formed on the lower substrate and a second side of the fluidic channel is formed on the cap, a photosensor array coupled to sensor control circuitry, and logic circuitry coupled to the fluidic control circuitry, and the sensor control circuitry.
Public/Granted literature
- US20210115507A1 Optical Detection for Bio-Entities Public/Granted day:2021-04-22
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