Invention Grant
- Patent Title: Method of using integrated electro-microfluidic probe card
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Application No.: US16588088Application Date: 2019-09-30
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Publication No.: US11703475B2Publication Date: 2023-07-18
- Inventor: Yi-Shao Liu , Fei-Lung Lai , Chun-Ren Cheng , Chun-Wen Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- The original application number of the division: US13673602 2012.11.09
- Main IPC: G01N27/414
- IPC: G01N27/414 ; G01N21/75 ; G01N33/543 ; G01N27/327 ; B01L3/00 ; B01L9/00

Abstract:
A method includes mounting an integrated electro-microfluidic probe card to a device area on a bio-sensor device wafer, wherein the electro-microfluidic probe card has a first major surface and a second major surface opposite the first major surface. The method further includes electrically connecting at least one electronic probe tip extending from the first major surface to a corresponding conductive area of the device area. The method further includes stamping a test fluid onto the device area. The method further includes measuring via the at least one electronic probe tip a first electrical property of one or more bio-FETs of the device area based on the test fluid.
Public/Granted literature
- US20200025713A1 METHOD OF USING INTEGRATED ELECTRO-MICROFLUIDIC PROBE CARD Public/Granted day:2020-01-23
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