Invention Grant
- Patent Title: Wafer trimming device
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Application No.: US17078278Application Date: 2020-10-23
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Publication No.: US11705323B2Publication Date: 2023-07-18
- Inventor: Jungseok Ahn , Unbyoung Kang , Chungsun Lee , Teakhoon Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR 20200043250 2020.04.09
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/304 ; B24B21/00 ; B28D5/02 ; B26D7/18 ; H01L21/68

Abstract:
The wafer trimming device includes a chuck table configured to hold a target wafer via suction, thereby fixing the target wafer, a notch trimmer configured to trim a notch of the target wafer, and an edge trimmer configured to trim an edge of the target wafer. The notch trimmer includes a notch trimming blade configured to rotate about a rotation axis perpendicular to a circumferential surface of the target wafer. The edge trimmer includes an edge trimming blade configured to rotate about a rotation axis parallel to the circumferential surface of the target wafer.
Public/Granted literature
- US20210320000A1 WAFER TRIMMING DEVICE Public/Granted day:2021-10-14
Information query
IPC分类: