Invention Grant
- Patent Title: Image sensor with dual trench isolation structure
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Application No.: US17197330Application Date: 2021-03-10
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Publication No.: US11705360B2Publication Date: 2023-07-18
- Inventor: Cheng-Hsien Chou , Sheng-Chau Chen , Tzu-Jui Wang , Sheng-Chan Li
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L27/146

Abstract:
In some embodiments, the present disclosure relates to an image sensor. The image sensor comprises a substrate. A photodetector is in the substrate and includes a semiconductor guard ring extending into a first side of the substrate. A shallow trench isolation (STI) structure extends into the first side of the substrate. An outer isolation structure extends into a second side of the substrate, opposite the first side of the substrate, to the STI structure. The STI structure and the outer isolation structure laterally surround the photodetector. An inner isolation structure extends into the second side of the substrate and overlies the photodetector. The inner isolation structure is vertically separated from the photodetector by the substrate. Further, the outer isolation structure laterally surrounds the inner isolation structure.
Public/Granted literature
- US20220293457A1 IMAGE SENSOR WITH DUAL TRENCH ISOLATION STRUCTURE Public/Granted day:2022-09-15
Information query
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