- 专利标题: Three-dimensional semiconductor memory devices
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申请号: US17076306申请日: 2020-10-21
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公开(公告)号: US11711920B2公开(公告)日: 2023-07-25
- 发明人: Sunggil Kim , Seulye Kim , Jung-Hwan Kim
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Fish & Richardson P.C.
- 优先权: KR 1020200037050 2020.03.26
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H10B43/27 ; H10B41/27 ; H01L21/02
摘要:
A semiconductor memory device includes a substrate with a cell array region and a connection region, an electrode structure including electrodes stacked on the substrate and having a staircase structure on the connection region, a vertical channel structure on the cell array region to penetrate the electrode structure and electrically connected to the substrate, a dummy structure on the connection region to penetrate the staircase structure, and a first sidewall oxide pattern interposed between the substrate and the dummy structure. The dummy structure includes an upper portion that is on the substrate, a middle portion that is in contact with the first sidewall oxide pattern, and a lower portion that is below the middle portion. With increasing vertical distance from the upper portion, a diameter of the middle portion decreases until it reaches its smallest value and then increases.
公开/授权文献
- US20210305276A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES 公开/授权日:2021-09-30
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