Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method thereof
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Application No.: US17351121Application Date: 2021-06-17
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Publication No.: US11716857B2Publication Date: 2023-08-01
- Inventor: Yu-Chien Chiu , Meng-Han Lin , Chun-Fu Cheng , Han-Jong Chia , Chung-Wei Wu , Zhiqiang Wu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT Law
- Agent Anthony King
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H01L29/06 ; H10B51/10 ; H10B51/30

Abstract:
A semiconductor memory device includes a stack of alternating insulating layers and first conductive layers disposed over a substrate; a plurality of memory cell strings penetrating the stack over the substrate, each memory cell string comprising a central portion extending through the stack, a semiconductor layer surrounding the central portion, and a ferroelectric layer surrounding the semiconductor layer, and the central portion comprising a channel isolation structure and a second conductive layer and a third conductive layer at two sides of the channel isolation structure; and a plurality of cell isolation structures penetrating the conductive layers and the insulating layers over the substrate and disposed between two memory cell strings, each cell isolation structure comprising a top portion and a bottom portion adjoined to the top portion and different from the top portion.
Public/Granted literature
- US20220406815A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-12-22
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