发明授权
- 专利标题: Detecting apparatus
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申请号: US17649714申请日: 2022-02-02
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公开(公告)号: US11726040B2公开(公告)日: 2023-08-15
- 发明人: Kazuki Mori , Ryohei Yamamoto
- 申请人: DISCO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: DISCO CORPORATION
- 当前专利权人: DISCO CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Greer, Burns & Crain, Ltd.
- 优先权: JP 21025026 2021.02.19
- 主分类号: G01N21/64
- IPC分类号: G01N21/64
摘要:
A detecting apparatus for use in specifying regions having different impurity concentrations in an ingot includes an ingot holding unit having a holding surface for holding the ingot thereon, an excitation light source for applying excitation light having a predetermined wavelength to a face side of the ingot held on the holding surface, and a photodetector for detecting fluorescence emitted from the ingot upon exposure to the excitation light and generating an electric signal representing a number of photons of only light whose wavelength is in an infrared radiation range, of the detected fluorescence.
公开/授权文献
- US20220268700A1 DETECTING APPARATUS 公开/授权日:2022-08-25
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