Invention Grant
- Patent Title: Microelectromechanical gyroscope and method for compensating an output thermal drift in a microelectromechanical gyroscope
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Application No.: US17524609Application Date: 2021-11-11
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Publication No.: US11740088B2Publication Date: 2023-08-29
- Inventor: Luca Guerinoni , Luca Giuseppe Falorni
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT 2020000028757 2020.11.27
- Main IPC: G01C25/00
- IPC: G01C25/00 ; G01C19/5712

Abstract:
A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.
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