发明授权
- 专利标题: Elastic wave device
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申请号: US17964370申请日: 2022-10-12
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公开(公告)号: US11742827B2公开(公告)日: 2023-08-29
- 发明人: Kazunori Inoue
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: KEATING & BENNETT, LLP
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/145
摘要:
An elastic wave device includes a piezoelectric film laminated on a first main surface of a support substrate including a recessed portion open to a first main surface. A cavity portion including the recessed portion is defined by the support substrate and the piezoelectric film. An electrode is on the piezoelectric film. The electrode includes first and second bus bars, a first electrode finger connected to the first bus bar, and a second electrode finger connected to the second bus bar. The first and second bus bars include corner portions inside the cavity portion when viewed in plan view. A curved portion as a pressure relaxation portion to relax pressure on the piezoelectric film at at least one of the corner portions of the first and second bus bars is provided between the corner portion and an outer edge of the cavity portion.
公开/授权文献
- US20230035609A1 ELASTIC WAVE DEVICE 公开/授权日:2023-02-02
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