Optical displacement measurement system, processing device, and optical displacement meter
Abstract:
A shape generation unit generates three-dimensional data of an adjustment workpiece by synthesizing a plurality of pieces of profile data generated corresponding to each position in a Y1 direction due to relative movement of the adjustment workpiece having a spherical surface in a movement direction A of an imaging head corresponding to the Y1 direction. A sphere information calculation unit calculates a parameter of the spherical surface defined by a plurality of points included in the three-dimensional data. A distortion amount calculation unit calculates a distortion amount of the spherical surface based on the parameter. A correction value calculation unit calculates at least one of a first rotation angle correction value about an X2 axis and a second rotation angle correction value about a Z2 axis in the plurality of pieces of profile data constituting the three-dimensional data so as to reduce the distortion amount.
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