Invention Grant
- Patent Title: Setting up inspection of a specimen
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Application No.: US17165826Application Date: 2021-02-02
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Publication No.: US11748872B2Publication Date: 2023-09-05
- Inventor: Hong Chen , Bjorn Brauer , Abdurrahman Sezginer , Sangbong Park , Ge Cong , Xiaochun Li
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corp.
- Current Assignee: KLA Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/88 ; G06T3/40

Abstract:
Methods and systems for setting up inspection of a specimen are provided. One system includes one or more computer subsystems configured for acquiring a reference image for a specimen and modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image. The one or more computer subsystems are also configured for storing the golden grid image for use in inspection of the specimen. The inspection includes aligning a test image of the specimen generated from output of an inspection subsystem to the golden grid image.
Public/Granted literature
- US20220067898A1 Setting Up Inspection of a Specimen Public/Granted day:2022-03-03
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