Invention Grant
- Patent Title: Support, bonding apparatus including the support, and method of fabricating display device using the bonding apparatus
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Application No.: US17189855Application Date: 2021-03-02
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Publication No.: US11752753B2Publication Date: 2023-09-12
- Inventor: Jungkyu Lee , Youngsu Kim , Kyungrok Ko
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: KILE PARK REED & HOUTTEMAN PLLC
- Priority: KR 20200067129 2020.06.03
- Main IPC: H01L51/56
- IPC: H01L51/56 ; B32B38/18 ; G06F1/16 ; G06F1/18 ; B32B37/00 ; B32B37/10 ; H10K71/00 ; H10K77/10

Abstract:
A bonding apparatus includes a support including a cavity, and a window fixing chuck facing the support. The support includes a first part including a first through hole extending from the cavity, and a second part extending in a downward direction from the first part and including a second through hole extending from the cavity. A first distance between a first inner surface of the first part and a first outer surface of the first part is less than a second distance between a second inner surface of the second part and a second outer surface of the second part. The first inner surface of the first part and the second inner surface of the second part form the cavity.
Public/Granted literature
Information query
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