- 专利标题: Gyro sensor, electronic device, and vehicle
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申请号: US17504919申请日: 2021-10-19
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公开(公告)号: US11754396B2公开(公告)日: 2023-09-12
- 发明人: Teruo Takizawa
- 申请人: Seiko Epson Corporation
- 申请人地址: JP Tokyo
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP 19140790 2019.07.31
- 主分类号: G01C19/5712
- IPC分类号: G01C19/5712
摘要:
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a mass section coupled to the driving section and displaced along the X axis, a detecting section coupled to the mass section, capable of turning around a Z axis crossing the X axis, and capable of being displaced along the Z axis by a Coriolis force acting on a turning motion horizontal to the substrate, and an elastic section coupling the detecting section and the fixed section. The fixed section is disposed between the center of gravity of the detecting section and the mass section in a plan view.
公开/授权文献
- US20220034658A1 Gyro Sensor, Electronic Device, And Vehicle 公开/授权日:2022-02-03
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