Invention Grant
- Patent Title: Hollow-core photonic crystal fiber based optical component for broadband radiation generation
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Application No.: US18093717Application Date: 2023-01-05
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Publication No.: US11754906B2Publication Date: 2023-09-12
- Inventor: Patrick Sebastian Uebel , Sebastian Thomas Bauerschmidt , Peter Maximilian Götz
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP 160457 2019.03.04
- Main IPC: G02F1/35
- IPC: G02F1/35 ; G02F1/365

Abstract:
Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
Public/Granted literature
- US20230146877A1 Hollow-Core Photonic Crystal Fiber Based Optical Component for Broadband Radiation Generation Public/Granted day:2023-05-11
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