Invention Grant
- Patent Title: Carrier FOUP and a method of placing a carrier
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Application No.: US16568910Application Date: 2019-09-12
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Publication No.: US11756816B2Publication Date: 2023-09-12
- Inventor: Steven Trey Tindel , Alexander N. Lerner , Kim Ramkumar Vellore
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/673

Abstract:
A carrier FOUP and a method of placing a carrier are provided. The carrier FOUP includes a body and a door. The body includes a plurality of chamfers, and one or more carriers are placed on, and supported by, the plurality of chamfers. The method of placing a carrier includes placing the carrier in the carrier FOUP and closing the door of the carrier FOUP. When the door is closed, the door pushes against the carrier and aligns the carrier with the alignment feature. The alignment features align the carrier, removing the need to be aligned by the factory interface robot when placing or removing the carrier from the carrier FOUP.
Public/Granted literature
- US20210028039A1 CARRIER FOUP AND A METHOD OF PLACING A CARRIER Public/Granted day:2021-01-28
Information query
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