An apparatus for supplying chemical liquid may include a chemical liquid supply head, a receiving member, a removing member and a supplying member. The chemical liquid supply head may provide a chemical liquid onto a substrate. The receiving member may receive a recycle chemical liquid discharged from the chemical liquid supply head, and the removing member may remove impurities remaining in the recycle chemical liquid received in the receiving member. The supplying member may provide the recycle chemical liquid from which the impurities are removed to the chemical liquid supply head.