- 专利标题: Semiconductor chip including through electrode, and semiconductor package including the same
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申请号: US17322557申请日: 2021-05-17
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公开(公告)号: US11764128B2公开(公告)日: 2023-09-19
- 发明人: Seung Hwan Kim , Hyun Chul Seo , Hyeong Seok Choi , Moon Un Hyun
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si
- 代理机构: WILLIAM PARK & ASSOCIATES LTD.
- 优先权: KR 20200186901 2020.12.30
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/498 ; H01L23/538 ; H01L23/00 ; H01L25/065
摘要:
A semiconductor chip includes a body part having a front surface and a rear surface, a plurality of through electrodes penetrating the body part and arranged in a first direction in an array region, a plurality of front surface connection electrodes respectively coupled to the through electrodes over the front surface of the body part, and a plurality of rear surface connection electrodes respectively coupled to the through electrodes over the rear surface of the body part. The array region includes a central region and edge regions positioned on both sides of the central region in the first direction. A center of the front surface connection electrode and a center of the rear surface connection electrode that are positioned in each of the edge regions are positioned at a distance farther from the central region than a center of the corresponding through electrode.
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