Invention Grant
- Patent Title: Vertical-cavity surface-emitting laser (VCSEL) tuned through application of mechanical stress via a piezoelectric material
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Application No.: US16665435Application Date: 2019-10-28
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Publication No.: US11769988B2Publication Date: 2023-09-26
- Inventor: Eran Aharon , Itshak Kalifa , Elad Mentovich , Matan Galanty , Isabelle Cestier
- Applicant: Mellanox Technologies, Ltd.
- Applicant Address: IL Yokneam
- Assignee: MELLANOX TECHNOLOGIES, LTD.
- Current Assignee: MELLANOX TECHNOLOGIES, LTD.
- Current Assignee Address: IL Yokneam
- Agency: Moore & Van Allen PLLC
- Agent R. W. McCord Rayburn
- Main IPC: H01S5/06
- IPC: H01S5/06 ; H01S5/183 ; H01S5/40 ; H01S5/42 ; H10N30/30 ; H01S5/026

Abstract:
A tunable vertical-cavity surface-emitting laser (VCSEL) is provided. The VCSEL includes a VCSEL emission structure, piezoelectric material, and a piezoelectric electrode. The VCSEL emission structure includes a first reflector; a second reflector; and an active cavity material structure disposed between the first and second reflectors. The active cavity material structure includes an active region. The piezoelectric material is mechanically coupled to the VCSEL emission structure such that when the piezoelectric material experiences a mechanical stress, the mechanical stress is transferred to the active cavity material structure of the VCSEL emission structure. The piezoelectric electrode is designed to cause an electric field within the piezoelectric material. The electric field causes the piezoelectric material to experience the mechanical stress, which causes the active cavity material structure to experience the mechanical stress, which causes the emission wavelength of the VCSEL to be modified from a nominal wavelength of the VCSEL.
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